All chlorosilanes react with water to produce hydrogen chloride. The remaining hydroxyl group bonds to the silicon, initially forming a silol group (analogous to alcohol). In general, this will eventually bond to a solid oxide surface or react with another chlorosilane or silol molecule. In the latter cases, the oxygen atom forms a link between two silicon atoms, analogous to the ether linkage in organic chemicals, and identical to the bonding in silicon dioxide.

Organic chlorosilanes are usually used as coatings for silicon and glass surfaces, and in the production of silicone (polysiloxane) polymers.

SiSiB® PC5620 is used to protect allylic esters as silylketene acetal. More stable but less volatile derivates than Me3Si-.