All chlorosilanes react with water to produce hydrogen chloride. The remaining hydroxyl group bonds to the silicon, initially forming a silol group (analogous to alcohol). In general, this will eventually bond to a solid oxide surface or react with another chlorosilane or silol molecule. In the latter cases, the oxygen atom forms a link between two silicon atoms, analogous to the ether linkage in organic chemicals, and identical to the bonding in silicon dioxide.

Organic chlorosilanes are usually used as coatings for silicon and glass surfaces, and in the production of silicone (polysiloxane) polymers.

Methyl chlorosilanes have one to three methyl groups. In the case of dichlorodimethylsilane, two chlorine atoms are available, so that a reaction with excess water produces a linear chain of ether-like linkages between silicon atoms. As in polyethers, these flexible linkages produce a rubbery polymer, polydimethylsiloxane (PDMS). Trichloromethylsilane can be used to induce branching and cross-linking in PDMS molecules, while chlorotrimethylsilane serves to end backbone chains, limiting molecular weight.

SiSiB® PC5310 is a typical Silane Blocking Agent, which can protect or deprotect functional groups selectively. It is widely used in the syntheses of drugs.